A Simple Displacement Function to Determine the Response of a Micro Capacitive Pressure Sensor

Ashwin Simha, S. M. Kulkarni, S. Meenatchisundaram, Somesakara Bhat

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The response of a capacitive pressure sensor is generally represented by a fourth order partial differential equation which is complex to solve and does not possess an exact solution. Several attempts have been made earlier through various techniques such as the Galerkin method, Finite Difference Method etc.... In this paper an attempt has been made to develop a simple approximate analytical approach to determine the response of a micro capacitive pressure sensor whose diaphragm is designed to undergo very small deflections (typically less than 25% of the thickness). The non-uniform gap between the electrodes is mathematically expressed as a combination of the initial gap between the electrodes (in the undeformed state) and a displacement function in (x,y). The proposed displacement function is then utilized in evaluating the capacitance as a function of the applied pressure. The results obtained from the analytical approach are benchmarked against those obtained from COMSOL Multiphysics®, a popular Finite Element Analysis tool in the MEMS industry. It is observed that the results obtained from COMSOL Multiphysics® and those from the analytical approach are in good agreement with a maximum deviation of about 8.66%.

Original languageEnglish
Title of host publication2nd International Conference on Methods and Models in Science and Technology, ICM2ST-11
Pages251-256
Number of pages6
Volume1414
DOIs
Publication statusPublished - 01-12-2011
Event2nd International Conference on Methods and Models in Science and Technology, ICM2ST-11 - Jaipur, India
Duration: 19-11-201120-11-2011

Conference

Conference2nd International Conference on Methods and Models in Science and Technology, ICM2ST-11
CountryIndia
CityJaipur
Period19-11-1120-11-11

Fingerprint

pressure sensors
electrodes
Galerkin method
diaphragms
partial differential equations
microelectromechanical systems
deflection
capacitance
industries
deviation

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

Cite this

Simha, A., Kulkarni, S. M., Meenatchisundaram, S., & Bhat, S. (2011). A Simple Displacement Function to Determine the Response of a Micro Capacitive Pressure Sensor. In 2nd International Conference on Methods and Models in Science and Technology, ICM2ST-11 (Vol. 1414, pp. 251-256) https://doi.org/10.1063/1.3669967
Simha, Ashwin ; Kulkarni, S. M. ; Meenatchisundaram, S. ; Bhat, Somesakara. / A Simple Displacement Function to Determine the Response of a Micro Capacitive Pressure Sensor. 2nd International Conference on Methods and Models in Science and Technology, ICM2ST-11. Vol. 1414 2011. pp. 251-256
@inproceedings{54e9226fa1304bd0a540fc9888805457,
title = "A Simple Displacement Function to Determine the Response of a Micro Capacitive Pressure Sensor",
abstract = "The response of a capacitive pressure sensor is generally represented by a fourth order partial differential equation which is complex to solve and does not possess an exact solution. Several attempts have been made earlier through various techniques such as the Galerkin method, Finite Difference Method etc.... In this paper an attempt has been made to develop a simple approximate analytical approach to determine the response of a micro capacitive pressure sensor whose diaphragm is designed to undergo very small deflections (typically less than 25{\%} of the thickness). The non-uniform gap between the electrodes is mathematically expressed as a combination of the initial gap between the electrodes (in the undeformed state) and a displacement function in (x,y). The proposed displacement function is then utilized in evaluating the capacitance as a function of the applied pressure. The results obtained from the analytical approach are benchmarked against those obtained from COMSOL Multiphysics{\circledR}, a popular Finite Element Analysis tool in the MEMS industry. It is observed that the results obtained from COMSOL Multiphysics{\circledR} and those from the analytical approach are in good agreement with a maximum deviation of about 8.66{\%}.",
author = "Ashwin Simha and Kulkarni, {S. M.} and S. Meenatchisundaram and Somesakara Bhat",
year = "2011",
month = "12",
day = "1",
doi = "10.1063/1.3669967",
language = "English",
isbn = "9780735409910",
volume = "1414",
pages = "251--256",
booktitle = "2nd International Conference on Methods and Models in Science and Technology, ICM2ST-11",

}

Simha, A, Kulkarni, SM, Meenatchisundaram, S & Bhat, S 2011, A Simple Displacement Function to Determine the Response of a Micro Capacitive Pressure Sensor. in 2nd International Conference on Methods and Models in Science and Technology, ICM2ST-11. vol. 1414, pp. 251-256, 2nd International Conference on Methods and Models in Science and Technology, ICM2ST-11, Jaipur, India, 19-11-11. https://doi.org/10.1063/1.3669967

A Simple Displacement Function to Determine the Response of a Micro Capacitive Pressure Sensor. / Simha, Ashwin; Kulkarni, S. M.; Meenatchisundaram, S.; Bhat, Somesakara.

2nd International Conference on Methods and Models in Science and Technology, ICM2ST-11. Vol. 1414 2011. p. 251-256.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - A Simple Displacement Function to Determine the Response of a Micro Capacitive Pressure Sensor

AU - Simha, Ashwin

AU - Kulkarni, S. M.

AU - Meenatchisundaram, S.

AU - Bhat, Somesakara

PY - 2011/12/1

Y1 - 2011/12/1

N2 - The response of a capacitive pressure sensor is generally represented by a fourth order partial differential equation which is complex to solve and does not possess an exact solution. Several attempts have been made earlier through various techniques such as the Galerkin method, Finite Difference Method etc.... In this paper an attempt has been made to develop a simple approximate analytical approach to determine the response of a micro capacitive pressure sensor whose diaphragm is designed to undergo very small deflections (typically less than 25% of the thickness). The non-uniform gap between the electrodes is mathematically expressed as a combination of the initial gap between the electrodes (in the undeformed state) and a displacement function in (x,y). The proposed displacement function is then utilized in evaluating the capacitance as a function of the applied pressure. The results obtained from the analytical approach are benchmarked against those obtained from COMSOL Multiphysics®, a popular Finite Element Analysis tool in the MEMS industry. It is observed that the results obtained from COMSOL Multiphysics® and those from the analytical approach are in good agreement with a maximum deviation of about 8.66%.

AB - The response of a capacitive pressure sensor is generally represented by a fourth order partial differential equation which is complex to solve and does not possess an exact solution. Several attempts have been made earlier through various techniques such as the Galerkin method, Finite Difference Method etc.... In this paper an attempt has been made to develop a simple approximate analytical approach to determine the response of a micro capacitive pressure sensor whose diaphragm is designed to undergo very small deflections (typically less than 25% of the thickness). The non-uniform gap between the electrodes is mathematically expressed as a combination of the initial gap between the electrodes (in the undeformed state) and a displacement function in (x,y). The proposed displacement function is then utilized in evaluating the capacitance as a function of the applied pressure. The results obtained from the analytical approach are benchmarked against those obtained from COMSOL Multiphysics®, a popular Finite Element Analysis tool in the MEMS industry. It is observed that the results obtained from COMSOL Multiphysics® and those from the analytical approach are in good agreement with a maximum deviation of about 8.66%.

UR - http://www.scopus.com/inward/record.url?scp=84856591120&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84856591120&partnerID=8YFLogxK

U2 - 10.1063/1.3669967

DO - 10.1063/1.3669967

M3 - Conference contribution

AN - SCOPUS:84856591120

SN - 9780735409910

VL - 1414

SP - 251

EP - 256

BT - 2nd International Conference on Methods and Models in Science and Technology, ICM2ST-11

ER -

Simha A, Kulkarni SM, Meenatchisundaram S, Bhat S. A Simple Displacement Function to Determine the Response of a Micro Capacitive Pressure Sensor. In 2nd International Conference on Methods and Models in Science and Technology, ICM2ST-11. Vol. 1414. 2011. p. 251-256 https://doi.org/10.1063/1.3669967