Characterization of boron- and phosphorous-incorporated tetrahedral amorphous carbon films deposited by the filtered cathodic vacuum arc process

Omvir Singh Panwar, Mohd Alim Khan, Mahesh Kumar, Sonnada Math Shivaprasad, Bukinakere Subbakrihniah Satyanarayana, Prakash Narain Dixit, Raghunath Bhattacharyya

Research output: Contribution to journalArticlepeer-review

16 Citations (Scopus)

Fingerprint Dive into the research topics of 'Characterization of boron- and phosphorous-incorporated tetrahedral amorphous carbon films deposited by the filtered cathodic vacuum arc process'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy