Circular capacitance micromachined ultrasonic transducer

Shailendra Kumar Tiwari, B. S. Satyanarayana, A. Gopalkrishna Pai, Kunal K. Trivedi

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

Capacitance micromachined ultrasonic transducers (CMUTs) have become an attractive alternative to the piezoelectric transducers, especially in air-coupled nondestructive evaluation (NDE) and ultrasound medical imaging flow metering, micro/nanoelectronics, and industrial cleaning, etc. These are similar to other capacitance transducers as these employ a vibrating membrane to send and receive ultrasound in air and water. This paper describes the theory and design of a circular micromachined ultrasonic transducer which could lead to a CMUT with many advantages, including less loading effect. The software programs (Intellisuite 8.2 and MATLAB 7.0) were used to model a single cell of CMUT. The simulations-based studies of the critical parameters like collapse voltage and snapback voltage, which influence the operation of the CMUTs to a large extent, has been discussed. Small signal equivalent circuit model for the circular CMUT has been discussed and the program (SPICE) has been used for the simulation of the small signal equivalent circuit.

Original languageEnglish
Pages (from-to)627-633
Number of pages7
JournalDefence Science Journal
Volume59
Issue number6
Publication statusPublished - 01-11-2009

Fingerprint

Ultrasonic transducers
transducers
Capacitance
ultrasonics
capacitance
Equivalent circuits
equivalent circuits
Ultrasonics
Piezoelectric transducers
Nanoelectronics
Medical imaging
Electric potential
SPICE
Air
piezoelectric transducers
air
electric potential
MATLAB
Transducers
Cleaning

All Science Journal Classification (ASJC) codes

  • Chemical Engineering(all)
  • Biomedical Engineering
  • Mechanical Engineering
  • Physics and Astronomy(all)
  • Computer Science Applications
  • Electrical and Electronic Engineering

Cite this

Tiwari, S. K., Satyanarayana, B. S., Pai, A. G., & Trivedi, K. K. (2009). Circular capacitance micromachined ultrasonic transducer. Defence Science Journal, 59(6), 627-633.
Tiwari, Shailendra Kumar ; Satyanarayana, B. S. ; Pai, A. Gopalkrishna ; Trivedi, Kunal K. / Circular capacitance micromachined ultrasonic transducer. In: Defence Science Journal. 2009 ; Vol. 59, No. 6. pp. 627-633.
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Tiwari, SK, Satyanarayana, BS, Pai, AG & Trivedi, KK 2009, 'Circular capacitance micromachined ultrasonic transducer', Defence Science Journal, vol. 59, no. 6, pp. 627-633.

Circular capacitance micromachined ultrasonic transducer. / Tiwari, Shailendra Kumar; Satyanarayana, B. S.; Pai, A. Gopalkrishna; Trivedi, Kunal K.

In: Defence Science Journal, Vol. 59, No. 6, 01.11.2009, p. 627-633.

Research output: Contribution to journalArticle

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Tiwari SK, Satyanarayana BS, Pai AG, Trivedi KK. Circular capacitance micromachined ultrasonic transducer. Defence Science Journal. 2009 Nov 1;59(6):627-633.