Dynamic simulation of micro resonator based differential pressure sensor

G. Uma, M. Umapathy, S. Meenatchisundaram

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

In this paper, a Micro resonating sensor with split mass concept is designed and analyzed for differential quantity measurement by extending the two mass concepts with one more drive mass. The model of the proposed resonator is derived and represented in state space form. The performance for differential pressure sensing is analyzed using MATLAB. The simulation results demonstrates that the first split mode frequency of third mass exhibiting high resonating magnitude variation with the differential pressure, which is simulated by varying the stiffness of the drive masses.

Original languageEnglish
Title of host publicationNanosensors, Microsensors, and Biosensors and Systems 2007
Volume6528
DOIs
Publication statusPublished - 01-11-2007
EventNanosensors, Microsensors, and Biosensors and Systems 2007 - San Diego, CA, United States
Duration: 21-03-200722-03-2007

Conference

ConferenceNanosensors, Microsensors, and Biosensors and Systems 2007
CountryUnited States
CitySan Diego, CA
Period21-03-0722-03-07

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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  • Cite this

    Uma, G., Umapathy, M., & Meenatchisundaram, S. (2007). Dynamic simulation of micro resonator based differential pressure sensor. In Nanosensors, Microsensors, and Biosensors and Systems 2007 (Vol. 6528). [65281G] https://doi.org/10.1117/12.716061