Dynamic simulation of micro resonator based differential pressure sensor

G. Uma, M. Umapathy, S. Meenatchisundaram

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

In this paper, a Micro resonating sensor with split mass concept is designed and analyzed for differential quantity measurement by extending the two mass concepts with one more drive mass. The model of the proposed resonator is derived and represented in state space form. The performance for differential pressure sensing is analyzed using MATLAB. The simulation results demonstrates that the first split mode frequency of third mass exhibiting high resonating magnitude variation with the differential pressure, which is simulated by varying the stiffness of the drive masses.

Original languageEnglish
Title of host publicationNanosensors, Microsensors, and Biosensors and Systems 2007
Volume6528
DOIs
Publication statusPublished - 01-11-2007
EventNanosensors, Microsensors, and Biosensors and Systems 2007 - San Diego, CA, United States
Duration: 21-03-200722-03-2007

Conference

ConferenceNanosensors, Microsensors, and Biosensors and Systems 2007
CountryUnited States
CitySan Diego, CA
Period21-03-0722-03-07

Fingerprint

Microresonators
differential pressure
Pressure Sensor
Pressure sensors
pressure sensors
Dynamic Simulation
Resonators
resonators
Computer simulation
MATLAB
simulation
Stiffness
Sensors
Space Form
Resonator
stiffness
State Space
Sensing
Sensor
sensors

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Uma, G., Umapathy, M., & Meenatchisundaram, S. (2007). Dynamic simulation of micro resonator based differential pressure sensor. In Nanosensors, Microsensors, and Biosensors and Systems 2007 (Vol. 6528). [65281G] https://doi.org/10.1117/12.716061
Uma, G. ; Umapathy, M. ; Meenatchisundaram, S. / Dynamic simulation of micro resonator based differential pressure sensor. Nanosensors, Microsensors, and Biosensors and Systems 2007. Vol. 6528 2007.
@inproceedings{4e3617931caa47dc8e650b3e307f2bde,
title = "Dynamic simulation of micro resonator based differential pressure sensor",
abstract = "In this paper, a Micro resonating sensor with split mass concept is designed and analyzed for differential quantity measurement by extending the two mass concepts with one more drive mass. The model of the proposed resonator is derived and represented in state space form. The performance for differential pressure sensing is analyzed using MATLAB. The simulation results demonstrates that the first split mode frequency of third mass exhibiting high resonating magnitude variation with the differential pressure, which is simulated by varying the stiffness of the drive masses.",
author = "G. Uma and M. Umapathy and S. Meenatchisundaram",
year = "2007",
month = "11",
day = "1",
doi = "10.1117/12.716061",
language = "English",
isbn = "0819466492",
volume = "6528",
booktitle = "Nanosensors, Microsensors, and Biosensors and Systems 2007",

}

Uma, G, Umapathy, M & Meenatchisundaram, S 2007, Dynamic simulation of micro resonator based differential pressure sensor. in Nanosensors, Microsensors, and Biosensors and Systems 2007. vol. 6528, 65281G, Nanosensors, Microsensors, and Biosensors and Systems 2007, San Diego, CA, United States, 21-03-07. https://doi.org/10.1117/12.716061

Dynamic simulation of micro resonator based differential pressure sensor. / Uma, G.; Umapathy, M.; Meenatchisundaram, S.

Nanosensors, Microsensors, and Biosensors and Systems 2007. Vol. 6528 2007. 65281G.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Dynamic simulation of micro resonator based differential pressure sensor

AU - Uma, G.

AU - Umapathy, M.

AU - Meenatchisundaram, S.

PY - 2007/11/1

Y1 - 2007/11/1

N2 - In this paper, a Micro resonating sensor with split mass concept is designed and analyzed for differential quantity measurement by extending the two mass concepts with one more drive mass. The model of the proposed resonator is derived and represented in state space form. The performance for differential pressure sensing is analyzed using MATLAB. The simulation results demonstrates that the first split mode frequency of third mass exhibiting high resonating magnitude variation with the differential pressure, which is simulated by varying the stiffness of the drive masses.

AB - In this paper, a Micro resonating sensor with split mass concept is designed and analyzed for differential quantity measurement by extending the two mass concepts with one more drive mass. The model of the proposed resonator is derived and represented in state space form. The performance for differential pressure sensing is analyzed using MATLAB. The simulation results demonstrates that the first split mode frequency of third mass exhibiting high resonating magnitude variation with the differential pressure, which is simulated by varying the stiffness of the drive masses.

UR - http://www.scopus.com/inward/record.url?scp=35548941164&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=35548941164&partnerID=8YFLogxK

U2 - 10.1117/12.716061

DO - 10.1117/12.716061

M3 - Conference contribution

AN - SCOPUS:35548941164

SN - 0819466492

SN - 9780819466495

VL - 6528

BT - Nanosensors, Microsensors, and Biosensors and Systems 2007

ER -

Uma G, Umapathy M, Meenatchisundaram S. Dynamic simulation of micro resonator based differential pressure sensor. In Nanosensors, Microsensors, and Biosensors and Systems 2007. Vol. 6528. 2007. 65281G https://doi.org/10.1117/12.716061