Abstract
In this paper, a Micro resonating sensor with split mass concept is designed and analyzed for differential quantity measurement by extending the two mass concepts with one more drive mass. The model of the proposed resonator is derived and represented in state space form. The performance for differential pressure sensing is analyzed using MATLAB. The simulation results demonstrates that the first split mode frequency of third mass exhibiting high resonating magnitude variation with the differential pressure, which is simulated by varying the stiffness of the drive masses.
| Original language | English |
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| Title of host publication | Nanosensors, Microsensors, and Biosensors and Systems 2007 |
| Volume | 6528 |
| DOIs | |
| Publication status | Published - 01-11-2007 |
| Event | Nanosensors, Microsensors, and Biosensors and Systems 2007 - San Diego, CA, United States Duration: 21-03-2007 → 22-03-2007 |
Conference
| Conference | Nanosensors, Microsensors, and Biosensors and Systems 2007 |
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| Country/Territory | United States |
| City | San Diego, CA |
| Period | 21-03-07 → 22-03-07 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering