Fingerprint Dive into the research topics of 'Extraction of residual stress and dimensions from electrical measurements on surface micromachined test structures'. Together they form a unique fingerprint.
- Sort by
- Weight
- Alphabetically
Extraction of residual stress and dimensions from electrical measurements on surface micromachined test structures
Somashekara Bhat, Enakshi Bhattacharya
Research output: Contribution to journal › Article
1
Citation
(Scopus)