Fabrication and characterization of ZnO/AI/ZnO multilayers by simultaneous DC and RF magnetron sputtering

K. K. Nagaraja, A. Santhosh Kumar, H. S. Nagaraja

Research output: Contribution to journalConference article

Abstract

The present investigation reports the fabrication and characterization of multilayered transparent electrodes by simultaneous DC and RF magnetron sputtering on glass substrates. The multilayer structure consists of three layers (ZnO/Al/ZnO). The influence of Al layer thickness on the electrical and optical properties was investigated. Optimum thickness of Al was determined for high transmittance and good electrical conductivity. High quality films having resistance as low as 25 Ω/sq with optical transmittance upto 65% were obtained at room temperature.

Original languageEnglish
Article number012071
JournalIOP Conference Series: Materials Science and Engineering
Volume73
Issue number1
DOIs
Publication statusPublished - 01-01-2015
EventInternational Conference on Materials Science and Technology, ICMST 2012 - Kerala, India
Duration: 10-06-201214-06-2012

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Opacity
Magnetron sputtering
Multilayers
Electric properties
Optical properties
Fabrication
Glass
Electrodes
Substrates
Temperature
Electric Conductivity

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Engineering(all)

Cite this

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abstract = "The present investigation reports the fabrication and characterization of multilayered transparent electrodes by simultaneous DC and RF magnetron sputtering on glass substrates. The multilayer structure consists of three layers (ZnO/Al/ZnO). The influence of Al layer thickness on the electrical and optical properties was investigated. Optimum thickness of Al was determined for high transmittance and good electrical conductivity. High quality films having resistance as low as 25 Ω/sq with optical transmittance upto 65{\%} were obtained at room temperature.",
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Fabrication and characterization of ZnO/AI/ZnO multilayers by simultaneous DC and RF magnetron sputtering. / Nagaraja, K. K.; Kumar, A. Santhosh; Nagaraja, H. S.

In: IOP Conference Series: Materials Science and Engineering, Vol. 73, No. 1, 012071, 01.01.2015.

Research output: Contribution to journalConference article

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