The present investigation reports the fabrication and characterization of multilayered transparent electrodes by simultaneous DC and RF magnetron sputtering on glass substrates. The multilayer structure consists of three layers (ZnO/Al/ZnO). The influence of Al layer thickness on the electrical and optical properties was investigated. Optimum thickness of Al was determined for high transmittance and good electrical conductivity. High quality films having resistance as low as 25 Ω/sq with optical transmittance upto 65% were obtained at room temperature.
|Journal||IOP Conference Series: Materials Science and Engineering|
|Publication status||Published - 01-01-2015|
|Event||International Conference on Materials Science and Technology, ICMST 2012 - Kerala, India|
Duration: 10-06-2012 → 14-06-2012
All Science Journal Classification (ASJC) codes
- Materials Science(all)