Hexagonal capacitance Micromachined Ultrasonic Transducer

Shailendra Kumar Tiwari, B. S. Satyanarayana, A. Gopalkrishna Pai, Kunal K. Trivedi, N. S. Rahul, Pratyush Sahay

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Capacitive Micromachined Ultrasonic Transducers (CMUTs), introduced about few decades ago, have been shown to be a good alternative to conventional piezoelectric transducers in various aspects, such as sensitivity, transduction efficiency, and bandwidth. It is used in a wide range of applications including Non destructive testing applications, medical imaging, flow metering, micro/nanoelectronics and industrial cleaning etc. The advent of MEMS technology has lead to intensive study of micro machined ultrasonic transducers. They are similar to other capacitance transducers as they employ a vibrating membrane to send and receive ultrasound in air and in water. The advantage of hexagonal Capacitance micro machined ultrasonic transducers (CMUTs) is that they can be operated in the high temperature range and the transducer array can be fabricated at a lower cost. Presented in this paper is a study on some aspects of the design of a modified CMUT, which the authors believe would lead to a CMUT with many advantages, including less loading effect and higher packing density. The focus of discussion in the paper is FEM simulation of a single cell hexagonal CMUT using polysilicon as membrane material. Also discussed is the simulation study of the critical parameters which influence the operation of the CMUTs. The simulations were carried out using MATLAB and IntelliSuite 8.0. The study indicates that in the range of study, the best performance is achieved at the natural resonance frequency, which is very desirable.

Original languageEnglish
Title of host publicationProceedings of the 2008 International Conference on Computing, Communication and Networking, ICCCN 2008
DOIs
Publication statusPublished - 01-12-2008
Event2008 International Conference on Computing, Communication and Networking, ICCCN 2008 - Karur, Tamil Nadu, India
Duration: 18-12-200820-12-2008

Conference

Conference2008 International Conference on Computing, Communication and Networking, ICCCN 2008
CountryIndia
CityKarur, Tamil Nadu
Period18-12-0820-12-08

Fingerprint

Ultrasonic transducers
Capacitance
Transducers
Membranes
Piezoelectric transducers
Nanoelectronics
Medical imaging
Nondestructive examination
Polysilicon
MATLAB
MEMS
Cleaning
Ultrasonics
Bandwidth
Finite element method
Air
Costs
Water

All Science Journal Classification (ASJC) codes

  • Computer Networks and Communications
  • Computer Science Applications
  • Electrical and Electronic Engineering

Cite this

Tiwari, S. K., Satyanarayana, B. S., Pai, A. G., Trivedi, K. K., Rahul, N. S., & Sahay, P. (2008). Hexagonal capacitance Micromachined Ultrasonic Transducer. In Proceedings of the 2008 International Conference on Computing, Communication and Networking, ICCCN 2008 [4787739] https://doi.org/10.1109/ICCCNET.2008.4787739
Tiwari, Shailendra Kumar ; Satyanarayana, B. S. ; Pai, A. Gopalkrishna ; Trivedi, Kunal K. ; Rahul, N. S. ; Sahay, Pratyush. / Hexagonal capacitance Micromachined Ultrasonic Transducer. Proceedings of the 2008 International Conference on Computing, Communication and Networking, ICCCN 2008. 2008.
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Tiwari, SK, Satyanarayana, BS, Pai, AG, Trivedi, KK, Rahul, NS & Sahay, P 2008, Hexagonal capacitance Micromachined Ultrasonic Transducer. in Proceedings of the 2008 International Conference on Computing, Communication and Networking, ICCCN 2008., 4787739, 2008 International Conference on Computing, Communication and Networking, ICCCN 2008, Karur, Tamil Nadu, India, 18-12-08. https://doi.org/10.1109/ICCCNET.2008.4787739

Hexagonal capacitance Micromachined Ultrasonic Transducer. / Tiwari, Shailendra Kumar; Satyanarayana, B. S.; Pai, A. Gopalkrishna; Trivedi, Kunal K.; Rahul, N. S.; Sahay, Pratyush.

Proceedings of the 2008 International Conference on Computing, Communication and Networking, ICCCN 2008. 2008. 4787739.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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AB - Capacitive Micromachined Ultrasonic Transducers (CMUTs), introduced about few decades ago, have been shown to be a good alternative to conventional piezoelectric transducers in various aspects, such as sensitivity, transduction efficiency, and bandwidth. It is used in a wide range of applications including Non destructive testing applications, medical imaging, flow metering, micro/nanoelectronics and industrial cleaning etc. The advent of MEMS technology has lead to intensive study of micro machined ultrasonic transducers. They are similar to other capacitance transducers as they employ a vibrating membrane to send and receive ultrasound in air and in water. The advantage of hexagonal Capacitance micro machined ultrasonic transducers (CMUTs) is that they can be operated in the high temperature range and the transducer array can be fabricated at a lower cost. Presented in this paper is a study on some aspects of the design of a modified CMUT, which the authors believe would lead to a CMUT with many advantages, including less loading effect and higher packing density. The focus of discussion in the paper is FEM simulation of a single cell hexagonal CMUT using polysilicon as membrane material. Also discussed is the simulation study of the critical parameters which influence the operation of the CMUTs. The simulations were carried out using MATLAB and IntelliSuite 8.0. The study indicates that in the range of study, the best performance is achieved at the natural resonance frequency, which is very desirable.

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Tiwari SK, Satyanarayana BS, Pai AG, Trivedi KK, Rahul NS, Sahay P. Hexagonal capacitance Micromachined Ultrasonic Transducer. In Proceedings of the 2008 International Conference on Computing, Communication and Networking, ICCCN 2008. 2008. 4787739 https://doi.org/10.1109/ICCCNET.2008.4787739