Abstract
The effects of substrate temperature and post deposition annealing on the structural, optical and electrical properties of vacuum deposited ZnSe thin films are presented here. The chemical composition of the films varied drastically with substrate temperature which in turn caused changes in various properties of the films. The grain size of the films increased with substrate temperature and also after annealing. The electrical properties of the films were found to be varying as a function of chemical composition and grain size.
| Original language | English |
|---|---|
| Pages (from-to) | 269-273 |
| Number of pages | 5 |
| Journal | Materials Science in Semiconductor Processing |
| Volume | 16 |
| Issue number | 2 |
| DOIs | |
| Publication status | Published - 01-04-2013 |
All Science Journal Classification (ASJC) codes
- Materials Science(all)
- Condensed Matter Physics
- Mechanics of Materials
- Mechanical Engineering