Influence of substrate temperature and post deposition annealing on the properties of vacuum deposited ZnSe thin films

K. Gowrish Rao, Kasturi V. Bangera, G. K. Shivakumar

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

The effects of substrate temperature and post deposition annealing on the structural, optical and electrical properties of vacuum deposited ZnSe thin films are presented here. The chemical composition of the films varied drastically with substrate temperature which in turn caused changes in various properties of the films. The grain size of the films increased with substrate temperature and also after annealing. The electrical properties of the films were found to be varying as a function of chemical composition and grain size.

Original languageEnglish
Pages (from-to)269-273
Number of pages5
JournalMaterials Science in Semiconductor Processing
Volume16
Issue number2
DOIs
Publication statusPublished - 01-04-2013

Fingerprint

Vacuum
Annealing
Thin films
vacuum
annealing
Substrates
thin films
chemical composition
Electric properties
grain size
electrical properties
Temperature
temperature
Chemical analysis
Structural properties
Optical properties
optical properties

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

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Influence of substrate temperature and post deposition annealing on the properties of vacuum deposited ZnSe thin films. / Gowrish Rao, K.; Bangera, Kasturi V.; Shivakumar, G. K.

In: Materials Science in Semiconductor Processing, Vol. 16, No. 2, 01.04.2013, p. 269-273.

Research output: Contribution to journalArticle

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