Integrated X-Band Inductor with a Nanoferrite Film Core

Ranajit Sai, Suresh D. Kulkarni, Masahiro Yamaguchi, Navakanta Bhat, S. A. Shivashankar

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

The performance of an on-chip X-band (8-12 GHz) inductor, integrated with a partially-inverted zinc ferrite (piZF) film, is presented. The ferrite-core inductor is realized in three steps - first, fabrication of an uncoated spiral inductor via a 130 nm Si-CMOS process in a foundry, followed by passivation removal around the coil by reactive ion etching (RIE), and finally, deposition of piZF directly on the coil by microwave-assisted solution-based processing. The resulting piZF film covers the inductor coil conformally and exhibits high saturation magnetization (MS=130 emu/cm3 and very low coercivity (HC < 15 Oe) at room temperature. The ferromagnetic resonance frequency (fFMR) of piZF was determined by the coplanar-waveguide ferromagnetic-resonance technique to be ∼sim30 GHz, well above the frequency of targeted X-band applications. The inductance-density and Q-factor of the piZF-coated inductor are enhanced by 13% and 25% to 450 nH/mm2 and 5.8, respectively, at 10 GHz. This is the first report of an on-chip ferrite-core RF inductor operating above 6 GHz.

Original languageEnglish
Article number7826968
JournalIEEE Magnetics Letters
Volume8
DOIs
Publication statusPublished - 01-01-2017

Fingerprint

Ferrite
Zinc
Ferromagnetic resonance
Coplanar waveguides
Reactive ion etching
Foundries
Saturation magnetization
Coercive force
Passivation
Inductance
Microwaves
Fabrication
Processing
Temperature

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials

Cite this

Sai, Ranajit ; Kulkarni, Suresh D. ; Yamaguchi, Masahiro ; Bhat, Navakanta ; Shivashankar, S. A. / Integrated X-Band Inductor with a Nanoferrite Film Core. In: IEEE Magnetics Letters. 2017 ; Vol. 8.
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Integrated X-Band Inductor with a Nanoferrite Film Core. / Sai, Ranajit; Kulkarni, Suresh D.; Yamaguchi, Masahiro; Bhat, Navakanta; Shivashankar, S. A.

In: IEEE Magnetics Letters, Vol. 8, 7826968, 01.01.2017.

Research output: Contribution to journalArticle

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