Plasma diagnostic studies of S bend filtered cathodic vacuum arc system for the deposition of tetrahedral amorphous carbon films

O. S. Panwar, Mohd Alim Khan, P. N. Dixit, B. S. Satyanarayana, R. Bhattacharyya, Sushil Kumar, C. M.S. Rauthan

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7 Citations (Scopus)

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Physics & Astronomy