Uncertainty analysis of microresonator using classical and interval methods

B. Vasuki, M. Umapathy, G. Uma, M. Shanmugavalli, S. Meenachisundaram

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents an uncertainty analysis of micro electro mechanical systems using analytical methods and interval analysis. Laterally driven polysilicon resonant micro structure is considered to illustrate the analysis.

Original languageEnglish
Title of host publicationNanosensors, Microsensors, and Biosensors and Systems 2007
Volume6528
DOIs
Publication statusPublished - 01-11-2007
Externally publishedYes
EventNanosensors, Microsensors, and Biosensors and Systems 2007 - San Diego, CA, United States
Duration: 21-03-200722-03-2007

Conference

ConferenceNanosensors, Microsensors, and Biosensors and Systems 2007
CountryUnited States
CitySan Diego, CA
Period21-03-0722-03-07

Fingerprint

Microresonators
Interval Methods
Interval Analysis
Uncertainty Analysis
Uncertainty analysis
Micro-electro-mechanical Systems
Analytical Methods
Polysilicon
Microstructure
intervals
microstructure

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

Vasuki, B., Umapathy, M., Uma, G., Shanmugavalli, M., & Meenachisundaram, S. (2007). Uncertainty analysis of microresonator using classical and interval methods. In Nanosensors, Microsensors, and Biosensors and Systems 2007 (Vol. 6528). [652812] https://doi.org/10.1117/12.716054
Vasuki, B. ; Umapathy, M. ; Uma, G. ; Shanmugavalli, M. ; Meenachisundaram, S. / Uncertainty analysis of microresonator using classical and interval methods. Nanosensors, Microsensors, and Biosensors and Systems 2007. Vol. 6528 2007.
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Vasuki, B, Umapathy, M, Uma, G, Shanmugavalli, M & Meenachisundaram, S 2007, Uncertainty analysis of microresonator using classical and interval methods. in Nanosensors, Microsensors, and Biosensors and Systems 2007. vol. 6528, 652812, Nanosensors, Microsensors, and Biosensors and Systems 2007, San Diego, CA, United States, 21-03-07. https://doi.org/10.1117/12.716054

Uncertainty analysis of microresonator using classical and interval methods. / Vasuki, B.; Umapathy, M.; Uma, G.; Shanmugavalli, M.; Meenachisundaram, S.

Nanosensors, Microsensors, and Biosensors and Systems 2007. Vol. 6528 2007. 652812.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Vasuki B, Umapathy M, Uma G, Shanmugavalli M, Meenachisundaram S. Uncertainty analysis of microresonator using classical and interval methods. In Nanosensors, Microsensors, and Biosensors and Systems 2007. Vol. 6528. 2007. 652812 https://doi.org/10.1117/12.716054